conference paper
Parallel atomic force microscopy using optical heterodyne detection
2006
MEMS, MOEMS, and Micromachining II
Type
conference paper
Author(s)
Manzardo, O.
Aeschimann, L.
Staufer, U.
Vettiger, P.
Weible, K.
Date Issued
2006
Published in
MEMS, MOEMS, and Micromachining II
Series title/Series vol.
Proc. SPIE; 6186
Start page
61860B
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record