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  4. Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
 
research article

Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation

de Koninck, David A.  
•
Molina-Lopez, Francisco
•
Briand, Danick  
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2014
Journal of Microelectromechanical Systems

A cleanroom-free fabrication process adapted to microfluidic devices is presented for pyrotechnical microelectromechanical systems balloon actuators. The actuators are intended for on-chip pumping and fluid ejection to replace tabletop pumping solutions in low-cost portable single-use microfluidic devices. The fabrication process leveraged polymeric foils (polyethylene terephthalate, SU-8, polydimethylsiloxane) for the structure, directly bonded using surface treatments, heat and pressure, and inkjet printing and electroplating for the igniter. This paper also presents a semianalytical model that successfully predicted the inflation height of the balloon for a given device geometry and propellant loading.

  • Details
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Type
research article
DOI
10.1109/Jmems.2014.2314702
Web of Science ID

WOS:000345851100019

Author(s)
de Koninck, David A.  
Molina-Lopez, Francisco
Briand, Danick  
de Rooij, Nico F.  
Date Issued

2014

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

23

Issue

6

Start page

1417

End page

1427

Subjects

Bonding processes

•

fluidic microsystems

•

microelectromechanical systems

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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SAMLAB  
Available on Infoscience
February 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/111521
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