conference proceedings 
Lithographic and Micromachining Techniques for Optical Component Fabrication
 2001 
Type
 conference proceedings 
ISBN
0-8194-4154-6
Editors
Date Issued
2001
Publisher
Publisher place
Bellingham, Washington
Series title/Series vol.
Proceedings of SPIE; 4440
Written at
EPFL
EPFL units
| Event name | Event place | Event date | 
San Diego, CA, USA  | July 29-30, 2001  | |
Available on Infoscience
 May 26, 2016 
Use this identifier to reference this record