Cite this item

Viallet, B., Grisolia, J., Ressier, L., Van Den Boogaart, M. A. F., Brugger, J., & Lebraud, T. (2008). Stencil assisted reactive ion etching for micro and nano patterning. Microelectronic Engineering, 85(8), 1705–1708. https://doi.org/10.1016/j.mee.2008.04.027

Click Copy to copy the citation, or select the text manually.