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conference paper

Digital holographic microscopy for nanometric quality control of micro- optical components

Kühn, J.
•
Charrière, F.  
•
Colomb, T.  
Show more
2007
Integrated Optics: Devices, Materials, and Technologies XI
Photonics West

In this paper, Digital Holographic Microscopy (DHM) is presented as a powerful tool for quality control of micro-optical components. It will be shown that not only the single-shot full field-of-view nanometer axial resolution makes DHM an ideal solution for such samples, but the DHM numerical wavefront correction formalism is perfectly adapted to provide advanced features like aberration coefficients, radius of curvature or optical surfaces roughness measurements. Both transmission and reflection configurations can be used depending of the micro-components under investigation. A transparent high aspect-ratio micro-components investigation procedure is also exposed in order to unable phase unwrapping. Each feature is illustrated with typical examples, ranging from a wide variety of micro-lenses (aspherical, cylindrical, squared) to cornercube micro- structures or diffractive elements.

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Type
conference paper
DOI
10.1117/12.700523
Web of Science ID

WOS:000246061700026

Author(s)
Kühn, J.
Charrière, F.  
Colomb, T.  
Cuche, E.  
Emery, Y.
Depeursinge, C.  
Date Issued

2007

Publisher

SPIE

Published in
Integrated Optics: Devices, Materials, and Technologies XI
ISBN of the book

9780819465887

Volume

6475

Subjects

[MVD]

•

Aberrations

•

Digital holography

•

Metrology

•

Micro-lenses

•

Micro-optics

•

Microscopy

URL

URL

http://spie.org/x648.html?product_id=700523
Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOA  
Event nameEvent placeEvent date
Photonics West

San Jose, CA

January 20-25, 2007

Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41638
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