Various top-down, bottom-up, and hybrid fabrication routes of discontinuous palladium nano and mesostructures can be used for the fabrication of resistor based H2 sensing devices. 1D, 2D, and 3D structures can be achieved using appropriate material templating and self-organization methods. Sensing mechanism is based on reversible gap closing/opening under H2/H2-free atmospheres undergoing the conversion equilibrium between Pd and PdH0.7. Sensing performances depend on device designs and material microstructures and assembling/organizations.