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  4. Fabrication process and characterization of suspended graphene membranes for RF NEMS capacitive switches
 
research article

Fabrication process and characterization of suspended graphene membranes for RF NEMS capacitive switches

Moldovan, Clara Fausta  
•
Vitale, Wolfgang Amadeus  
•
Sharma, Pankaj  
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2015
Microelectronic Engineering

The fabrication of a Nanoelectromechanical System (NEMS) capacitive switch consisting of a suspended multilayer graphene membrane, doubly clamped on a coplanar waveguide (CPW) is presented and its RF performance is evaluated. The scattering parameters are measured and compared with theory in order to assess rigorously the advantages of using multilayer graphene as a membrane for the switch. Our results show that while, in theory, graphene remains a promising candidate for NEMS applications, significant efforts are needed for improving the fabrication process of suspended graphene membranes and the quality and reproducibility of reported devices.

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Type
research article
DOI
10.1016/j.mee.2015.01.032
Web of Science ID

WOS:000362152200003

Author(s)
Moldovan, Clara Fausta  
•
Vitale, Wolfgang Amadeus  
•
Sharma, Pankaj  
•
Bernard, Laurent S.
•
Ionescu, Adrian Mihai  
Date Issued

2015

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

145

Start page

5

End page

8

Subjects

Nanoelectromechanical switch

•

RF NEMS

•

Graphene

•

Multilayer

•

Suspended

•

CVD

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
July 16, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116328
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