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conference paper
Lowering motional resistance by partially HfO2 gap filling in double-ended tuning fork MEMS resonators.
2017
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC)
Type
conference paper
Authors
Publication date
2017
Publisher
Published in
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC)
Start page
805
End page
806
Peer reviewed
REVIEWED
EPFL units
| Event name | Event place | Event date |
BESANÇON, France | 9-13 July 2017 | |
Available on Infoscience
November 17, 2017
Use this identifier to reference this record