conference paper
Infra-red MEMS-based Lamellar Grating Spectrometer
2004
MEMS, MOEMS, and Micromachinig
Type
conference paper
Author(s)
Date Issued
2004
Published in
MEMS, MOEMS, and Micromachinig
Series title/Series vol.
Proc. SPIE; 5455
Start page
1
End page
8
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record