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  4. Radio Frequency Temperature Transducers Based On Insulator-Metal Phase Transition In Vo2 And Ge-Doped Vo2 Ald Thin Films
 
conference paper

Radio Frequency Temperature Transducers Based On Insulator-Metal Phase Transition In Vo2 And Ge-Doped Vo2 Ald Thin Films

Muller, Andrei A.  
•
Khadar, Riyaz
•
Niang, Kham M.
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January 1, 2021
2021 21St International Conference On Solid-State Sensors, Actuators And Microsystems (Transducers)
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

The need for new accurate temperature monitoring is becoming high, especially with the proliferation of IoT monitoring and biological applications. In this work, we report the design, fabrication and electrical characterization results of a new type of resonant RF sensors that can be used as RF temperature tags, exploiting the high temperature sensitivity of reversible insulator-metal transition in VO2. We have explored split-ring resonator transducers on 40 nm thick undoped VO2 and on 2.3% Ge-doped VO2 ALD thin films below coplanar waveguide (CPW). The temperature sensing principle is based on the non-linear dielectric constant variation of VO2 around its transition temperature. We demonstrate two regions with very contrasted temperature sensitivities in insulator-phase and near-transition temperature. For the Ge-doped VO2 resonator, the experimental temperature sensitivity is higher than for the VO2 resonator, reaching 6.9 MHz/degrees C between 25 and 78 degrees C and a record high value of 463 MHz/degrees C between 78 and 95 degrees C, respectively. This shows that doping plays an important role in controlling both transition temperature and temperature sensitivity.

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Type
conference paper
DOI
10.1109/TRANSDUCERS50396.2021.9495498
Web of Science ID

WOS:000707041600350

Author(s)
Muller, Andrei A.  
•
Khadar, Riyaz
•
Niang, Kham M.
•
Bai, Guandong
•
Matioli, Elison  
•
Robertson, John
•
Ionescu, Adrian M.  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 21St International Conference On Solid-State Sensors, Actuators And Microsystems (Transducers)
ISBN of the book

978-0-7381-2562-6

Series title/Series vol.

International Solid-State Sensors Actuators and Microsystems Conference

Start page

1355

End page

1358

Subjects

rf

•

temperature sensor

•

resonant frequency

•

vo2

•

thermal-stability

•

wireless

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
POWERLAB  
NANOLAB  
Event nameEvent placeEvent date
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

ELECTR NETWORK

Jun 20-25, 2021

Available on Infoscience
November 6, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/182756
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