Thermal scanning probe lithography is a novel lithographic method that allows to create three dimension pattern with high precision at the micro and nano scale. In this project, the impact of two important parameters (the distance be- tween the tip and the substrate before patterning and the electrostatic force) on the depth and the roughness of the pattern were tested. An experiment about a pulsed mode was done to observe the impact on the depth and the roughness. In the end, a small experiment was done to test the repeatability between experiments with identical parameters. This project allowed to show the important impact of the tested parameters on the patterning quality. Moreover, it showed that the use of a new tip changes highly the characteristics of the pattern.