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  4. Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications
 
research article

Combination of additive and subtractive laser 3D microprocessing in hybrid glass/polymer microsystems for chemical sensing applications

Tickunas, Titas
•
Perrenoud, Matthieu  
•
Butkus, Simas
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2017
Optics Express

We present a novel hybrid glass-polymer micromechanical sensor by combining two femtosecond laser direct writing processes: laser illumination followed by chemical etching of glass and two-photon polymerization. This incorporation of techniques demonstrates the capability of combining mechanical deformable devices made of silica with an integrated polymer structure for passive chemical sensing application. We demonstrate that such a sensor could be utilized for investigating the elastic properties of polymeric microstructures fabricated via the two-photon polymerization technique. Moreover, we show that polymeric microstructure stiffness increases when immersed in organic liquids. (C) 2017 Optical Society of America

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Type
research article
DOI
10.1364/Oe.25.026280
Web of Science ID

WOS:000413103300129

Author(s)
Tickunas, Titas
Perrenoud, Matthieu  
Butkus, Simas
Gadonas, Roaldas
Rekstyte, Sima
Malinauskas, Mangirdas
Paipulas, Domas
Bellouard, Yves  
Sirutkaitis, Valdas
Date Issued

2017

Publisher

Optical Society of America

Published in
Optics Express
Volume

25

Issue

21

Start page

26280

End page

26288

Subjects

Femtosecond lasers

•

polymer

•

glass

•

3D printing

•

additive manufacturing

•

substrative manufacturing

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
Available on Infoscience
November 8, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/141973
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