book part or chapter
Application of Diffractive and Micro-Optics in Lithography
2004
Encyclopedia of Modern Optics
Type
book part or chapter
Author(s)
Kettunen, V.
Date Issued
2004
Publisher
Published in
Encyclopedia of Modern Optics
ISBN of the book
0-12-227600-0
Start page
281
End page
290
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record