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  4. A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE)
 
research article

A systematic characterization method for gravity-feed micro-hole drilling in glass with spark assisted chemical engraving (SACE)

Wüthrich, Rolf
•
Spaelter, Ulrich  
•
Wu, Y
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2006
Journal of Micromechanics and Microengineering

Gravity-feed drilling is the most commonly used method for micro-hole drilling in glass with spark assisted chemical engraving (SACE). This paper proposes a method allowing the systematic characterization of this drilling method. The influences of voltage, tool shape and force are investigated. It is found that SACE gravity-feed drilling shows two regimes depending on the drilling depth. During the first 200–300 μm, the discharge regime, controlled by the number of discharges inside the gas film, allows fast drilling (up to about 100 μm s–1). For deeper depths, the drilling is controlled by the hydrodynamic regime in which the drilling speed is limited by the flow of the electrolyte inside the micro-hole resulting in slow drilling of typically 10 μm s–1. Furthermore, it is shown how the gas film build-up time is limiting the drilling speed.

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Type
research article
DOI
10.1088/0960-1317/16/9/019
Web of Science ID

WOS:000239774600038

Author(s)
Wüthrich, Rolf
Spaelter, Ulrich  
Wu, Y
Bleuler, Hannes  
Date Issued

2006

Published in
Journal of Micromechanics and Microengineering
Volume

16

Issue

9

Start page

1891

End page

1896

Subjects

SACE

•

Glass micro-machining

•

Robotics

•

Microengineering

•

[SACE]

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSRO  
Available on Infoscience
August 8, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/232769
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