Changes in sample concentrations of CO2 or organic acids cause potential instabilities when polymer membranes are directly applied to the surface of ion-selective field-effect transistors (ISFETs). Currently used designs avoid this well-documented effect by placing a layer of aqueous buffer between polymeric membrane and ISFET serving as internal reference element. Here, we propose another solution to the problem. In order to compensate for the effect of pH changes on the ISFET threshold voltage, a double membrane is applied whose inner layer is pH-sensitive, while the outer layer exposed to the sample is a conventional ion-selective membrane. It is shown that this approach strongly reduces the earlier-mentioned interference effects. © 2002 Elsevier Science B.V. All rights reserved.