conference paper 
From Micro-Optics to optical MEMS
 2003 
Ninth Microoptics Conference MOC'03
Type
 conference paper 
Author(s)
Date Issued
2003
Publisher
Published in
Ninth Microoptics Conference MOC'03
Series title/Series vol.
Technical Digest
Start page
88
End page
91
Written at
OTHER
EPFL units
Available on Infoscience
 April 22, 2009 
Use this identifier to reference this record