Loading...
conference paper
Reflow Of Non-Circular Nano-Pillars To Fabricate Nano-Scale Solid Immersion Lenses
2012
Proceedings of the IEEE Photonics Society International Conference on Optical MEMS & Nanophotonics
We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spotsize reduction and peak-intensity enhancement, which are consistent with the immersion effect.
Loading...
Name
Myun-Sik_Kim_OpticalMEMS_Nanophotonics_2012_rev05_wn.pdf
Access type
openaccess
Size
511.11 KB
Format
Adobe PDF
Checksum (MD5)
892d699150c6ee57636d953a9db37a47