90 MHz nanomechanical structures fabricated by stencil deposition and dry etching
We present a simple method for fabricating fast resonating (90 MHz) nanomechanical elements based on the local deposition through a miniaturized shadow mask (nanostencil), followed by dry etching to release the structure from the substrate. The measured resonance frequency of a fabricated nanomechanical structure shows high resonance frequency up to 90 MHz. This resistless and dry process provides a flexible, rapid and stiction-free approach for the fabrication of ultra-fast resonating elements in various materials.
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Kim, G. M., van den Boogaart, M. A. F., Kawai, S., Kawakatsu, H., & Brugger, J. (2003). 90 MHz nanomechanical structures fabricated by stencil deposition and dry etching. Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers ’03), 1, 883–886. https://doi.org/10.1109/SENSOR.2003.1215616
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