Milinewton force sensor based on low temperature co-fired ceramic (LTCC) technology
Fabrication of a millinewton force sensor, which is based on LTCC technology as an alternative to the widely used alumina (Al2O3) is described. The new sensor, integrated with piezoresistor thick-film, has shown an increase in the sensitivity by two times compared to the alumina-based version in the first attempt. This is ascribed to the smaller elastic modulus and finer substrate thickness attainable by LTCC. Moreover design flexibility is also an important factor, which contributes to the increased sensitivity of the sensor. It is strongly expected that the device performance can further be improved, by modifying the co-fired LTCC components such as LTCC tape and the thick-film terminations.
2005 Birol PRIME MilliNewton capteur de force LTCC.pdf
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2005 Birol PRIME MilliNewton capteur de force LTCC - présentation.pdf
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