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research article
ABH damping of monolithic silica glass cantilever by structural and material modification using fs laser micromachining
September 27, 2020
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Name
Tomita et al. - 2020 - ABH damping of monolithic silica glass cantilever .pdf
Type
Publisher's version
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restricted
License Condition
Copyright
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1.23 MB
Format
Adobe PDF
Checksum (MD5)
917150c3a89181321af12f12febc419c