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  4. Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE
 
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conference poster not in proceedings

Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

Plaza, J. A.
•
Villanueva, G.  
•
Sanchez, A.
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2005
19th European Conference on Sensors and Actuators (Eurosensors)

We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define rocket tips (apex and shaft parts of the tip are etched separately). Then, those rocket tips are fabricated on cantilevers obtaining finally complete AFM probes. DRIE is also used to shape the cantilevers and to machine the whole silicon wafer. Very high yield and very high uniformity are obtained because of the use of dry etchings. Customized fabrication of AFM probes with similar features than the reference ones is demonstrated.

  • Details
  • Metrics
Type
conference poster not in proceedings
Author(s)
Plaza, J. A.
•
Villanueva, G.  
•
Sanchez, A.
•
Zinoviev, K.
Date Issued

2005

Subjects

afm probes

•

drie

•

atomic-force microscope

•

local oxidation

•

silicon

•

tips

•

oscillation

•

access

•

modes

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
Event nameEvent placeEvent date
19th European Conference on Sensors and Actuators (Eurosensors)

Barcelona, Spain

2005

RelationURL/DOI

IsRelatedto

https://infoscience.epfl.ch/record/187904
Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93837
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