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  4. Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors
 
conference paper

Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors

Zappa, D.
•
Briand, D.  
•
Comini, E.
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2012
Procedia Engineering

Zinc oxides (ZnO) nanowires were successfully deposited on plastic low-power micro-hotplates using the thermal oxidation technique. Metallic zinc layer was deposited on the sensing transducer by RF magnetron sputtering and then oxidized in a controlled atmosphere in order to obtain ZnO nanostructures. Morphological investigations confirmed the nanometric dimensions of the fabricated nanostructures. The n-type behavior of the nanostructured material was evaluated towards different chemical species to highlight the electrical properties of the materials. Calibration curves for the detection of several chemical species were defined. © 2012 The Authors. Published by Elsevier Ltd.

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Type
conference paper
DOI
10.1016/j.proeng.2012.09.352
Author(s)
Zappa, D.
•
Briand, D.  
•
Comini, E.
•
Courbat, J.  
•
de Rooij, N. F.  
•
Sberveglieri, G.
Date Issued

2012

Published in
Procedia Engineering
Volume

47

Start page

1137

End page

1140

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

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SAMLAB  
Available on Infoscience
January 25, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/88174
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