Combination of the surfactant-free nonaqueous sol-gel approach with the microwave technique makes it possible to synthesize Fe3O4, CoFe2O4, MnFe2O4, and NiFe 2O4 nanoparticles of about 5-6 nm and with high crystallinity and good morphological uniformity. The synthesis involves the reaction of metal acetates or acetylacetonates as precursors with benzyl alcohol at 170 °C under microwave irradiation of 12 min. Immersion of glass substrates in the reaction solution results in the deposition of homogeneous metal ferrite films whose thickness can be adjusted through the precursor concentration. If preformed nickel nanoparticles are used as a type of curved substrate, the ferrite nanoparticles coat the seeds and form core-shell structures. These results extend the microwave-assisted nonaqueous sol-gel approach beyond the simple synthesis of nanoparticles to the preparation of thin films on flat or curved substrates. © 2010 Springer Science+Business Media, LLC.