Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle
 
research article

Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle

Malecha, Karol
•
Maeder, Thomas  
•
Jacq, Caroline  
Show more
2011
Microelectronics Reliability

A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25 μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin (<50 μm) membranes and microchannels in low temperature co-fired ceramics (LTCC) substrate. The properties of the graphite-based paste have been examined using thermo-gravimetric analysis (TGA), differential thermo-gravimetric (DTG) and differential thermal analysis (DTA). The obtained membranes and microchannels have been investigated using scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX) and optical profile measurements gauge.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

2011 Malecha LTCC structuration graphite - véhicule PVA dans H2O-PG-G - corrigé.pdf

Access type

openaccess

Size

2.64 MB

Format

Adobe PDF

Checksum (MD5)

af721c8602b837cb2847496c304eec78

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés