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  4. Funnelling of rf current via a plasmoid through a grid hole in an rf capacitive plasma reactor
 
research article

Funnelling of rf current via a plasmoid through a grid hole in an rf capacitive plasma reactor

Chesaux, M.
•
Howling, A. A.
•
Hollenstein, Ch
2013
Plasma Sources Science & Technology

The boundaries of capacitively coupled radio-frequency (rf) plasma reactors generally include at least one grounded metal grid or perforated plate for purposes of gas flow or diagnostic access. When increasing the rf power, an intense localized plasma (a plasmoid) can spontaneously ignite in a hole of a grounded surface. Experiments described here show that the plasmoid funnels rf current through the hole to the other side of the grounded plate, thereby increasing the effective grounded area in contact with the plasma. Hence, plasmoid ignition is always accompanied by a drop in the dc self-bias voltage of the rf electrode. The small area of the plasmoid aperture means that the rf current density passing through the plasmoid is very high, causing intense optical emission and strong local heating. Plasmoid ignition can therefore cause a loss of process reproducibility and potentially lead to melting and eventual destruction of reactor components.

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Type
research article
DOI
10.1088/0963-0252/22/5/055006
Web of Science ID

WOS:000325246400006

Author(s)
Chesaux, M.
Howling, A. A.
Hollenstein, Ch
Date Issued

2013

Publisher

Iop Publishing Ltd

Published in
Plasma Sources Science & Technology
Volume

22

Issue

5

Article Number

055006

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CRPP  
SPC  
Available on Infoscience
November 4, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/96573
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