Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Design of a miniature laser scanning head for high-bandwidth, low-amplitude beam steering
 
conference paper

Design of a miniature laser scanning head for high-bandwidth, low-amplitude beam steering

Kruis, J.
•
Bellouard, Y.  
•
Chappuis, O.
Show more
2012
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)
International Symposium on Optomechatronic Technologies (ISOT)

In laser micro-manufacturing, one of the challenges is to achieve fast scanning speed for fast fabrication of complex 3D microstructures. For microstructures with nanoscale features, it is often desirable to steer laser beams from a few microns to a few tens of nanometers away from their initial main trajectory. Here, we report on the design, fabrication and characterization of an optomechanical miniature laser scanning-head based on a movable focusing lens to cope with this challenge.

  • Details
  • Metrics
Type
conference paper
Author(s)
Kruis, J.
Bellouard, Y.  
Chappuis, O.
Clavel, R.  
Date Issued

2012

Published in
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)
Subjects

Beam steering

•

tip tilt focus

•

scanning head

•

flexures

•

femtosecond laser

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSRO  
Event nameEvent placeEvent date
International Symposium on Optomechatronic Technologies (ISOT)

Paris, France

October 29-31, 2012

Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116470
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés