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  4. Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes
 
conference paper

Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes

Wu, Songmei  
•
Wildhaber, Fabien  
•
Bertsch, Arnaud  
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2013
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

We present here Al2O3/W hetero-structured nanopore membranes which function as native and electrical field tunable nanofluidic diodes. A typical membrane is 100×100 μm2 in size with pore density of ∼ 20/μm2. The nanopores are 26 nm in diameter and 400 nm in length. Owing to the opposite surface charge states of Al 2O3 (positive) and W (negative with native oxide), the membrane exhibits clear rectification of ion current in electrolyte solutions. After thermal heating at 350°C for 2 hrs, approximately 10 nm WOx grows on the surface of W, forming a conformal and dense dielectric layer. The W layer allows the application of an electrical field to further modulate the ionic transport through the nanopores with low gate potentials and ultra low gate leakage current. We have demonstrated the control of rectifying factor from 2 to 11. Our experimental findings have a valuable potential for controllable high throughput molecular separation and chemical processors.

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Type
conference paper
DOI
10.1109/NEMS.2013.6559890
Web of Science ID

WOS:000327183000213

Author(s)
Wu, Songmei  
Wildhaber, Fabien  
Bertsch, Arnaud  
Brugger, Juergen  
Renaud, Philippe  
Date Issued

2013

Publisher

IEEE

Published in
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Start page

998

End page

1001

Subjects

Nanofluidic diode

•

Nanopore membrane

•

heterogeneous nanopore

•

AAO

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
LMIS4  
Event nameEvent placeEvent date
8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

Suzhou, China

April 7-10, 2013

Available on Infoscience
December 16, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/97974
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