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  4. Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices
 
research article

Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices

Sun, Haomin  
•
Banerjee, Soham
•
Sharma, Sarveshwar
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October 1, 2023
Physics Of Plasmas

Achieving large-scale kinetic modeling is a crucial task for the development and optimization of modern plasma devices. With the trend of decreasing pressure in applications, such as plasma etching, kinetic simulations are necessary to self-consistently capture the particle dynamics. The standard, explicit, electrostatic, momentum-conserving particle-in-cell method suffers from restrictive stability constraints on spatial cell size and temporal time step, requiring resolution of the electron Debye length and electron plasma period, respectively. This results in a very high computational cost, making the technique prohibitive for large volume device modeling. We investigate the direct implicit algorithm and the explicit energy conserving algorithm as alternatives to the standard approach, both of which can reduce computational cost with a minimal (or controllable) impact on results. These algorithms are implemented into the well-tested EDIPIC-2D and LTP-PIC codes, and their performance is evaluated via 2D capacitively coupled plasma discharge simulations. The investigation reveals that both approaches enable the utilization of cell sizes larger than the Debye length, resulting in a reduced runtime, while incurring only minor inaccuracies in plasma parameters. The direct implicit method also allows for time steps larger than the electron plasma period; however, care must be taken to avoid numerical heating or cooling. It is demonstrated that by appropriately adjusting the ratio of cell size to time step, it is possible to mitigate this effect to an acceptable level.

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Type
research article
DOI
10.1063/5.0160853
Web of Science ID

WOS:001146815400001

Author(s)
Sun, Haomin  
Banerjee, Soham
Sharma, Sarveshwar
Powis, Andrew Tasman
Khrabrov, Alexander V.
Sydorenko, Dmytro
Chen, Jian
Kaganovich, Igor D.
Date Issued

2023-10-01

Publisher

Aip Publishing

Published in
Physics Of Plasmas
Volume

30

Issue

10

Article Number

103509

Subjects

Physical Sciences

•

Low-Pressure

•

Ion Energy

•

Frequency-Dependence

•

Independent Control

•

Physical Regimes

•

Fluid Simulation

•

Discharges

•

Distributions

•

Reconnection

•

Generation

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SPC-TH  
FunderGrant Number

U.S. Department of Energy through PPPL Laboratory Directed Research & Development (LDRD) program

e National Energy Research Scientific Computing Center (NERSC), a U.S. Department of Energy Office of Science User Facility located at Lawrence Berkeley National Laboratory

DE-AC02-05CH11231

Available on Infoscience
February 23, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/205325
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