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research article

Optical fibers with patterned ZnO/electrode coatings for flexural actuators

Trolier-McKinstry, S.
•
Fox, G. R.
•
Kholkin, A.
Show more
1999
Sensors and Actuators A: Physical

A fiber-based flexural actuator was developed using a patterned piezoelectric ZnO/electrode fiber coating on a standard telecommunications optical fiber. The actuator was composed of a concentric inner Cr/Au electrode, a thick sputtered ZnO coating, and an outer Cr/Au electrode. Using standard photolithography, 30-mu m wide gaps in one of the electrodes were patterned along 2-cm lengths parallel with the fiber axis. This device can be driven in a bimorph mode. It was demonstrated that a split electrode actuator could be excited into electromechanical resonance to produce useful displacements at the end of the fiber. Such flexural fiber actuators could be used in scanning near field optical microscopes for fiber tip height adjustment. In addition, the actuator design can be extended to manufacture two-axis integrated fiber alignment devices. (C) 1999 Elsevier Science S.A. All rights reserved.

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Type
research article
DOI
10.1016/S0924-4247(98)00273-8
Web of Science ID

WOS:000079737800010

Author(s)
Trolier-McKinstry, S.
•
Fox, G. R.
•
Kholkin, A.
•
Muller, C. A. P.
•
Setter, N.  
Date Issued

1999

Published in
Sensors and Actuators A: Physical
Volume

73

Issue

3

Start page

267

End page

274

Subjects

zno

•

piezoelectric fiber coating

•

actuator

•

photolithography

•

sample distance control

•

phase modulators

•

microscopes

Note

Trolier-McKinstry, S Penn State Univ, Mat Res Lab, University Pk, PA 16802 USA Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland

186PH

Cited References Count:17

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233413
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