conference paper
Effective SAW excitation on non-piezoelectric substrate using AlScN piezoelectric thin film BAW/SAW hybrid transducer
2017
2017 Ieee International Ultrasonics Symposium (Ius)
Acoustic delay lines based on Al0.85Sc0.15N thin film hybrid transducers were investigated by finite element modeling. It was found that an acoustic impedance matching between transducer and non-piezoelectric substrate material plays a crucial role to efficiently excite a traveling surface acoustic wave (SAW) through the BAW piston motion. Test devices based on the 2.5 um thick Al0.85Sc0.15N piezoelectric film on the silicon substrate were fabricated and characterized.
Type
conference paper
Web of Science ID
WOS:000416948400166
Author(s)
Date Issued
2017
Publisher
Publisher place
New York
Published in
2017 Ieee International Ultrasonics Symposium (Ius)
ISBN of the book
978-1-5386-3383-0
Total of pages
3
Series title/Series vol.
IEEE International Ultrasonics Symposium
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Washington, DC | SEP 06-09, 2017 | |
Available on Infoscience
January 15, 2018
Use this identifier to reference this record