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  4. Uni-directional GaN-on-Si MOSHEMTs with high reverse-blocking voltage based on nanostructured Schottky drain
 
conference paper

Uni-directional GaN-on-Si MOSHEMTs with high reverse-blocking voltage based on nanostructured Schottky drain

Ma, Jun  
•
Matioli, Elison
May 13, 2018
2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)
30th IEEE International Symposium on Power Semiconductor Devices and ICs (ISPSD)

In this work we present uni-directional GaN-on-Si MOSHEMTs with state-of-the-art reverse-blocking performance. We integrated tri-anode Schottky barrier diodes (SBDs) with slanted tri-gate field plates (FPs) as the drain electrode, and achieved a high reverse-blocking voltage (V-RB) of -759 +/- 37 V at 0.1 mu A/mm with grounded substrate. The hybrid Schottky drain did not degrade the ON-state performance when compared with conventional ohmic drain, and the turn-ON voltage (V-ON) was as small as 0.64 +/- 0.02 V. These results show the potential of GaN-on-Si transistors as high-performance uni-directional power switches, and open enormous opportunities for future highly integrated GaN power devices.

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