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  4. Plastic micropumps using ferrofluid and magnetic membrane actuation
 
conference paper

Plastic micropumps using ferrofluid and magnetic membrane actuation

Yamahata, C.  
•
Gijs, M. A. M.  
2004
Proc. MEMS 2004, 17th IEEE Int. Conf. on. Micro Electro Mechanical Systems
International conference on Micro Electro Mechanical Systems (MEMS 2004)

This paper presents a simple and low-cost prototyping technology for the realization of integrated micropumps in polymethylmethacrylate (PMMA). The three-dimensional (3D) micropumps consist of stacks of structured PMMA layers, which are either realised with precision milling tools for the more complex parts, or fabricated using the powder blasting technique for channel-type structures. We integrate silicone membranes into the chip to realize check-valves or use dynamic diffuser valves. We use two different types of magnetic actuation external to the micropump: (i) an external magnet displaces a ferrofluid liquid plug that plays the role of a piston in a channel; (ii) an external coil actuates an integrated magnetic membrane, consisting of NdFeB magnetic powder in a polydimethylsiloxane (PDMS) matrix.

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