Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Laser-Induced Forward Transfer of SU-8 Microdisks as Carriers of Metallic Microdevices
 
research article

Laser-Induced Forward Transfer of SU-8 Microdisks as Carriers of Metallic Microdevices

Yang, Zhiwei  
•
Boero, Giovanni  
•
Widmer, Remo
Show more
November 8, 2024
Journal Of Microelectromechanical Systems

Laser-induced forward transfer (LIFT) is a digital additive manufacturing technique that uses a pulsed laser to transfer various materials from a donor film to a receiver substrate placed in close proximity. In this work, we investigate the transfer of SU-8 microdisks on which metallic microdevices have been patterned. These components are directly fabricated on the donor substrate and their performance was evaluated after the transfer by LIFT. The influence of laser fluence, SU-8 thickness and donor-to-receiver gap on the SU-8 microdisk transfer was investigated. Successful and damage-free transfer of SU-8 microdisks can be achieved with optimized parameter combinations. The adhesion between the transferred SU-8 microdisks and different receivers was also assessed. These tests indicate that the adhesion without additional glue between SU-8 and the receiver is adequate for standard applications. The assembly of SU-8 microdisks to form multi-layer structures was also demonstrated. Large-scale transfer of a $40\times 40$ SU-8 microdisk array within 20 minutes was achieved to assess the transfer scalability of the LIFT process. As an application example, we transferred a temperature sensor onto a receiver with pre-patterned contact electrodes and characterized its performance. Our work opens a route to directly manufacturing wafer-scale microdevices on the donor substrate and enables the heterogeneous integration of such devices onto numerous functional surfaces with deterministic distribution and scale.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

10.1109_jmems.2024.3487248.pdf

Type

Main Document

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

License Condition

CC BY-NC-ND

Size

1.77 MB

Format

Adobe PDF

Checksum (MD5)

63dcc47bfed3af70a33148306540041b

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés