conference presentation
Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration
2012
Type
conference presentation
Author(s)
Date Issued
2012
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
UC Berkeley and Stanford University, CA, USA | August 7-15, 2012 | |
Available on Infoscience
July 8, 2015
Use this identifier to reference this record