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research article

Process optimisation of a MEMS based PZT actuated microswitch

Tommasi, A.
•
Coletta, G.
•
Balma, D.
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2014
Microelectronic Engineering

In this work the fabrication of a piezoelectrically actuated microswitch for high current applications is proposed. The device was obtained by assembling two silicon substrates: one containing the signal lines and the other enclosing a silicon nitride (Si3N4) microcantilever. This latter operates as a switch by closing the circuit with a metal electrode on its tip. A layer of lead zirconate titanate (PZT), deposited by sol gel method, constitutes the actuation element of the microcantilever. The bottom and top electrodes of the PZT were respectively made of thin Ta/Pt and Au layers while the signal lines and the contact electrode on the microcantilever tip were made of Ti/Al. A comparison between microcantilevers characterised by different bottom electrodes is presented: (i) Ta/Pt deposited at 300 degrees C and patterned by wet etching, (ii) Ta/Pt deposited at 100 degrees C and patterned by lift-off. The microcantilevers fabricated with the latter metallisation show a considerable symmetry of the piezoelectric response and a wide microcantilever displacement. Thus, in this device the cantilever microstructures are able to close the gap between the signal lines with a resulting contact resistance of about 2 Omega. (C) 2014 Elsevier B.V. All rights reserved.

  • Details
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Type
research article
DOI
10.1016/j.mee.2014.04.005
Web of Science ID

WOS:000343364400029

Author(s)
Tommasi, A.
Coletta, G.
Balma, D.
Marasso, S. L.
Perrone, D.
Canavese, G.
Stassi, S.
Bianco, S.
Cocuzza, M.
Pirri, C. F.
Date Issued

2014

Publisher

Elsevier Science Bv

Published in
Microelectronic Engineering
Volume

119

Start page

137

End page

140

Subjects

MEMS

•

Microswitch

•

Microcantilever

•

PZT

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
December 30, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/109596
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