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research article

Indirect identification and compensation of lateral scanner resonances in atomic force microscopes

Burns, D. J.
•
Youcef-Toumi, K.
•
Fantner, G. E.  
2011
Nanotechnology

Improving the imaging speed of atomic force microscopy (AFM) requires accurate nanopositioning at high speeds. However, high speed operation excites resonances in the AFM's mechanical scanner that can distort the image, and therefore typical users of commercial AFMs elect to operate microscopes at speeds below which scanner resonances are observed. Although traditional robust feedforward controllers and input shaping have proven effective at minimizing the influence of scanner distortions, the lack of direct measurement and use of model-based controllers have required disassembling the microscope to access lateral scanner motion with external sensors in order to perform a full system identification experiment, which places excessive demands on routine microscope operators. Further, since the lightly damped instrument dynamics often change from experiment to experiment, model-based controllers designed from offline system identification experiments must trade off high speed performance for robustness to modeling errors.

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Type
research article
DOI
10.1088/0957-4484/22/31/315701
Web of Science ID

WOS:000292689600016

Author(s)
Burns, D. J.
Youcef-Toumi, K.
Fantner, G. E.  
Date Issued

2011

Published in
Nanotechnology
Volume

22

Issue

31

Article Number

315701

Subjects

Biological Applications

•

Probe Microscopy

•

Real-Time

•

Tracking

•

Afm

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LBNI  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/73835
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