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  4. Proton-induced fixed positive charge at the Si(100)-SiO2 interface
 
research article

Proton-induced fixed positive charge at the Si(100)-SiO2 interface

Godet, J.
•
Giustino, F.
•
Pasquarello, Alfredo  
2007
Physical Review Letters

Positively charged defects induced by protons at the Si(100)-SiO2 interface are studied through density-functional calculations and realistic interface models. Protons generally preserve the bonding network, but cause the spontaneous breaking of strained bonds leading to threefold-coordinated Si(3)(+) and O(3)(+). Defect energies fall within a band of similar to 0.5 eV, which is stabilized by similar to 0.3 eV at the interface. Only the O(3)(+) at similar to 1 eV lower energies stand out as deep defects. This description is consistent with several experimental observations and supports the O(3)(+) as the origin of the fixed positive charge generated during silicon oxidation, in accord with a previous suggestion inferred from electrical data.

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Type
research article
DOI
10.1103/PhysRevLett.99.126102
Web of Science ID

WOS:000249668000047

Author(s)
Godet, J.
Giustino, F.
Pasquarello, Alfredo  
Date Issued

2007

Published in
Physical Review Letters
Volume

99

Article Number

126102

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CSEA  
Available on Infoscience
October 8, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43525
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