conference paper
Growth, Properties, and Applications of Al1-xScxN Thin Films
January 1, 2019
2019 IEEE International Ultrasonics Symposium (Ius)
The discovery of enhanced piezoelectricity in solid solutions of AlN and ScN is certainly one of the most important events in piezoelectric MEMS. As compared to pure AlN, it brought a crucial factor 2 to 3 improvement in a number of figures of merit governing the performance of MEMS devices. The aim of this contribution is to give a short overview on actual topics in processing, properties, and applications in RF filters and sensors.
Type
conference paper
Web of Science ID
WOS:000510220100066
Author(s)
Date Issued
2019-01-01
Publisher
Publisher place
New York
Published in
2019 IEEE International Ultrasonics Symposium (Ius)
ISBN of the book
978-1-7281-4596-9
Series title/Series vol.
IEEE International Ultrasonics Symposium
Start page
255
End page
257
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
Glasgow, UK | October 06-09, 2019 | |
Available on Infoscience
March 5, 2020
Use this identifier to reference this record