Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications
 
research article

Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

Dalcanale, Federico
•
Grossenbacher, Jonas  
•
Blugan, Gurdial
Show more
2014
Journal of the European Ceramic Society

An analysis about the effect of carbon enrichment of allylhydridopolycarbosilane SMP10® with divinylbenzene (DVB) as a promising material for electrical conductive micro-electrical mechanical systems (MEMS) is presented. The liquid precursors can be micropipetted and cured in polytetrafluoroethylene (PTFE) molds to produce 14 mm diameter disc shaped samples. The effect of pyrolysis temperature and carbon content on the electrical conductivity is discussed. The addition of 28.7 wt.% of DVB was found to be the optimum amount. Carbon was preserved in the microstructure during pyrolysis and the ceramic yield increased from 77.5 to 80.5 wt.%. The electrical conductivity increased from 10^−6 to 1 S/cm depending on the annealing temperature. Furthermore, the ceramic samples obtained with this composition were found to be in many cases crack free or with minimal cracks in contrast with the behavior of pure SMP10. Using the same process we demonstrate that also microsized ceramic samples can be produced.

  • Details
  • Metrics
Type
research article
DOI
10.1016/j.jeurceramsoc.2014.06.002
Web of Science ID

WOS:000340976200011

Author(s)
Dalcanale, Federico
•
Grossenbacher, Jonas  
•
Blugan, Gurdial
•
Gullo, R. Maurizio
•
Lauria, Alessandro
•
Brugger, Jürgen  
•
Tevaearai, Hendrik
•
Graule, Thomas
•
Niederberger, Markus
•
Kuebler, Jakob
Date Issued

2014

Publisher

Elsevier Sci Ltd

Published in
Journal of the European Ceramic Society
Volume

34

Issue

15

Start page

3559

End page

3570

Subjects

Polymer derived ceramics

•

Polycarbosilane

•

MEMS

•

Divinylbenzene

•

Electrical conductivity

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LMIS1  
Available on Infoscience
July 9, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/104975
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés