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  4. A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization
 
conference paper

A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization

Dainesi, P.  
•
Thévenaz, Luc  
•
Fluckiger, Ph.  
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2001
Proceedings of IEEE International SOI Conference, 2001
IEEE International SOI Conference, 2001

This paper reports on a novel, simple yet reliable, unbalanced SOI Mach-Zehnder (M-Z) interferometer architecture based on 1.2 μm CMOS process and adapted post-processing for the waveguide sidewalls. The fabricated electro-optical device is based on multiple PIN diode bars integrated on top of a SOI silicon waveguide and can be operated either at: (I) high-frequency (few MHz) based on the plasma dispersion effect and (II) low frequency (<1 MHz) based on the thermo-optic effect. The device main characteristics and figures of merit are presented and discussed.

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2001_IEEE_SOI_CONF_Photonics_Optosimox.mdi

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