Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Hybrid laser 3D microprocessing in glass/polymer micromechanical sensor: towards chemical sensing applications
 
conference paper

Hybrid laser 3D microprocessing in glass/polymer micromechanical sensor: towards chemical sensing applications

Tickunas, Titas
•
Malinauskas, Mangirdas
•
Gadonas, Roaldas
Show more
January 1, 2018
3D Printed Optics And Additive Photonic Manufacturing
Conference on 3D Printed Optics and Additive Photonic Manufacturing

We demonstrate the fabrication of a 3D polymer/glass micromechanical sensor by combining two femtosecond laser direct writing processes: subtractive laser-assisted chemical etching combined with additive two-photon polymerization techniques. In the first step, the micromechanical sensor was fabricated from a single fused silica substrate by selective laser etching technique. The mechanical parameters of the glass are well-researched, thus it could be used to investigate unknown polymer mechanical properties through the concept of coupled-system. In the second step, we directly integrate polymeric beam via two-photon polymerization. This combination of additive and subtractive techniques allows investigation of reversible deformations of polymeric microstructures upon immersion in various solvents. Furthermore, we demonstrate that Young's modulus of these laser fabricated structures could be altered by changing the writing laser exposure dose, also influenced by surrounding solvent.

  • Details
  • Metrics
Type
conference paper
DOI
10.1117/12.2307533
Web of Science ID

WOS:000453079600004

Author(s)
Tickunas, Titas
Malinauskas, Mangirdas
Gadonas, Roaldas
Bellouard, Yves  
Paipulas, Domas
Date Issued

2018-01-01

Publisher

SPIE-INT SOC OPTICAL ENGINEERING

Publisher place

Bellingham

Published in
3D Printed Optics And Additive Photonic Manufacturing
ISBN of the book

978-1-5106-1877-0

Series title/Series vol.

Proceedings of SPIE

Volume

10675

Start page

106750C

Subjects

Optics

•

Optics

•

two-photon polymerization

•

femtosecond laser-assisted etching

•

3d microstructures

•

sz2080

•

silica

•

reversible deformations

•

microactuators

•

3d printing

•

microfabrication

•

polymerization

•

channels

•

silica

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
Event nameEvent placeEvent date
Conference on 3D Printed Optics and Additive Photonic Manufacturing

Strasbourg, FRANCE

Apr 23-24, 2018

Available on Infoscience
December 26, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/153196
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés