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  4. Complex nanostructures in PMMA made by a single process step using e-beam lithography
 
conference paper

Complex nanostructures in PMMA made by a single process step using e-beam lithography

Gautsch, S.  
•
Studer, M.
•
de Rooij, N. F.  
2009
Microelectronic Engineering
35th International Conference on Micro & Nano Engineering

We present results on the single step fabrication of autocentered nanopillars with surrounding circular rim. This particular 3-dimensional shape is created by the energy density distribution of incident and backscattered electrons and reflects the dual behavior of PMMA as positive and negative e-beam resist. Structures with 80 nm rim diameter and 20 nm wide nanopillars could be realized. We could show that the characteristic dimensions of the structures can be varied almost independently by playing with the exposure parameters. Qualitative and quantitative analysis of the structure shapes are described and several fields of application are proposed.

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Type
conference paper
DOI
10.1016/j.mee.2009.10.046
Web of Science ID

WOS:000276300700114

Author(s)
Gautsch, S.  
Studer, M.
de Rooij, N. F.  
Date Issued

2009

Published in
Microelectronic Engineering
Volume

87

Start page

1139

End page

1142

Subjects

e-Beam

•

Nanopillars

•

Autocentered

•

Pmma

•

Nanostructures

•

Field Emitters

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
35th International Conference on Micro & Nano Engineering

Ghent, Belgium

September 28-October 01, 2009

Available on Infoscience
January 22, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45967
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