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research article

Switching Kinetics Control of W-Based ReRAM Cells in Transient Operation by Interface Engineering

Shahrobi, Elmira
•
Giovinazzo, Cecilia  
•
Hadad, Mahmoud  
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July 2, 2019
Advanced Electronic Materials

Tungsten (W) is one of the most promising materials to be used in resistive random-access memory electrodes due to its low work function and compatibility with semiconductors, which raises the possibility of device integration, scalability, and low power consumption. However, W has multiple oxidation states that affect device reliability, due to the formation of semistable oxides at the switching interface. W chemical interaction is modulated through the insertion of Al2O3 or Ti interfacial layers. The time-dependent switching kinetics are investigated in transient Set/Reset operations. It is observed that a compact and stoichiometric atomic-layer-deposited Al2O3 barrier layer completely prevents W oxidation, resulting in a sharp current transient. The use of a sputtered Ti buffer layer allows a partial W oxidation, defining a tunable high-resistance state by pulse rise time control. Notable improvements in endurance, power consumption, resistance state stabilization, and cycle-to-cycle and device-to-device variability are reported. Switching kinetics and conductive nanofilament evolution are studied in detail to understand the microscopic effect of the interface modifications. The tunability of multi-HRS states by pulse timing control in Pt/HfO2/Ti/W is in the interest of network and brain-inspired computing applications, adding a degree of freedom in the modulation of its resistance.

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Type
research article
DOI
10.1002/aelm.201800835
Web of Science ID

WOS:000474067100001

Author(s)
Shahrobi, Elmira
Giovinazzo, Cecilia  
Hadad, Mahmoud  
LaGrange, Thomas  
Ramos, Miguel
Ricciardi, Carlo
Leblebici, Yusuf  
Date Issued

2019-07-02

Publisher

WILEY

Published in
Advanced Electronic Materials
Article Number

1800835

Subjects

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

oxidation

•

reram

•

tungsten

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driven ion migration

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random-access memory

•

metal-oxide

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temperature

•

mechanism

•

devices

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
CIME  
LSM  
Available on Infoscience
July 20, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/159252
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