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research article

Accurate 3-axis measurement of inhomogeneous magnetic fields

Renella, Dragana Popovic
•
Spasic, Sasa
•
Ughini, Remo
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October 1, 2019
Tm-Technisches Messen

Hall effect based Teslameters/Gaussmeters measure DC and AC magnetic flux densities in the range from a few mu T to about 30 T. For accurate measurement a 3-axis Hall probe is applied with small magnetic field sensitive volume (MFSV) of 100 mu m x 10 mu m x 100 mu m, with vertical and horizontal Hall elements integrated on a single chip. The planar Hall effect, that produces additional measurement errors is suppressed by the spinning current technique. The orthogonality error of the 3-axis Hall probe is reduced to smaller than 0.1 degrees by the described calibration procedure. This paper explains why the above features are crucial for some applications in industry and modern science for accurate measurement of inhomogeneous magnetic fields and how to achieve them. The future technology trends in magnetic metrology are introduced and the newly developed Nanomapper that incorporates a 3-axis Hall probe with a MFSV of smaller than 10 x 10 x 10 micrometer is presented.

  • Details
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Type
research article
DOI
10.1515/teme-2018-0082
Web of Science ID

WOS:000491222000007

Author(s)
Renella, Dragana Popovic
Spasic, Sasa
Ughini, Remo
Popovic, Radivoje S.  
Date Issued

2019-10-01

Published in
Tm-Technisches Messen
Volume

86

Issue

10

Start page

599

End page

608

Subjects

Instruments & Instrumentation

•

Instruments & Instrumentation

•

3d hall sensor

•

3-axis magnetic field measurement

•

teslameter

•

gaussmeter

•

nano magnetic field mapper

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
IMT  
Available on Infoscience
November 1, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/162612
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