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research article

Selective area epitaxy of GaAs: the unintuitive role of feature size and pitch

Dede, Didem  
•
Glas, Frank
•
Piazza, Valerio  
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November 26, 2022
Nanotechnology

Selective area epitaxy (SAE) provides the path for scalable fabrication of semiconductor nanostructures in a device-compatible configuration. In the current paradigm, SAE is understood as localized epitaxy, and is modelled by combining planar and self-assembled nanowire growth mechanisms. Here we use GaAs SAE as a model system to provide a different perspective. First, we provide evidence of the significant impact of the annealing stage in the calculation of the growth rates. Then, by elucidating the effect of geometrical constraints on the growth of the semiconductor crystal, we demonstrate the role of adatom desorption and resorption beyond the direct-impingement and diffusion-limited regime. Our theoretical model explains the effect of these constraints on the growth, and in particular why the SAE growth rate is highly sensitive to the pattern geometry. Finally, the disagreement of the model at the largest pitch points to non-negligible multiple adatom recycling between patterned features. Overall, our findings point out the importance of considering adatom diffusion, adsorption and desorption dynamics in designing the SAE pattern to create pre-determined nanoscale structures across a wafer. These results are fundamental for the SAE process to become viable in the semiconductor industry.

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Type
research article
DOI
10.1088/1361-6528/ac88d9
Web of Science ID

WOS:000852140100001

Author(s)
Dede, Didem  
Glas, Frank
Piazza, Valerio  
Morgan, Nicholas  
Friedl, Martin  
Guniat, Lucas  
Nur Dayi, Elif
Balgarkashi, Akshay  
Dubrovskii, Vladimir G.
Morral, Anna Fontcuberta i  
Date Issued

2022-11-26

Publisher

IOP Publishing Ltd

Published in
Nanotechnology
Volume

33

Issue

48

Article Number

485604

Subjects

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

molecular beam epitaxy

•

gaas

•

selective area epitaxy

•

growth

•

molecular-beam epitaxy

•

oxide desorption

•

surface

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMSC1  
Available on Infoscience
September 26, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/191039
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