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research article

A new characterization approach to study the mechanical behavior of silicon nanowires

Pakzad, Sina Zare
•
Esfahani, Mohammad Nasr
•
Tasdemir, Zuhal
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August 3, 2021
Mrs Advances

This work proposes a new approach to characterize the mechanical properties of nanowires based on a combination of nanomechanical measurements and models. Silicon nanowires with a critical dimension of 90 nm and a length of 8 mu m obtained through a monolithic process are characterized through in-situ three-point bending tests. A nonlinear nanomechanical model is developed to evaluate the mechanical behavior of nanowires. In this model, the intrinsic stress and surface parameters are examined based on Raman spectroscopy measurements and molecular dynamics simulations, respectively. This work demonstrates a new approach to measure the mechanical properties of Si nanowires by considering the surface effect and intrinsic stresses. The presented technique can be used to address the existing discrepancies between numerical estimations and experimental measurements on the modulus of elasticity of silicon nanowires.

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Type
research article
DOI
10.1557/s43580-021-00117-x
Web of Science ID

WOS:000680798700001

Author(s)
Pakzad, Sina Zare
Esfahani, Mohammad Nasr
Tasdemir, Zuhal
Wollschlaeger, Nicole
Li, XueFei
Li, Taotao
Yilmaz, Mustafa
Leblebici, Yusuf  
Alaca, B. Erdem
Date Issued

2021-08-03

Publisher

SPRINGER HEIDELBERG

Published in
Mrs Advances
Volume

6

Start page

500

End page

505

Subjects

Materials Science, Multidisciplinary

•

Materials Science

•

surface-stress

•

molecular-dynamics

•

elastic properties

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSM  
Available on Infoscience
August 14, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/180677
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