A 3-D simulation of substrate currents is crucial to analyze parasitic coupling effects due to minority carrier injection in smart power ICs. In this paper, a substrate parasitic extraction methodology is introduced by dividing the IC layout into elementary elements to solve the continuity equation for minority carriers in the volume based on the finite-difference method. A substrate parasitic network is derived from the mesh generated through the existing mixed-signal design flow. The induced substrate model is included in circuit simulators such as SPICE to predict the effects of substrate couplings during the design phase. Furthermore, this analysis enables optimization of layout with minimal parasitic effects. By linking the substrate model to the active components, the couplings between the integrated circuit with the substrate parasitic currents can be analyzed during circuit simulations. Simulations and measurements on an high voltage driver reveal consistent results and therefore confirm the validity of the method. Therefore, the approach developed herein is effective to predict parasitic couplings due the injection of minority carriers.