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  4. Cryogenic Front-to-Back Coupling in FD-SOI for Tunable Qubits by Localized Metallic Back-Gate
 
research article

Cryogenic Front-to-Back Coupling in FD-SOI for Tunable Qubits by Localized Metallic Back-Gate

Bersano, Fabio  
•
Ghini, Michele  
•
Bouquet, I.
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In this study, we develop and experimentally validate the integration of a localized metallic back-gate into a multi-gate silicon-on-insulator (SOI) field-effect transistor (FET), aimed at enabling front-gate coupling efficiency from room to cryogenic (mK) temperatures. The fabrication was enabled by the so-called Nanomole process, via controlled and localized vapor-phase etching of either the BOX (with vapor-HF) or the silicon substrate (with XeF^2 ) followed by ALD metallization. We report the electrical characterization of front and back gate transistor operation and resulting threshold voltage control at cryogenic temperatures. Additional cryogenic simulations support our data, showing quantum dot formation via front-back coupling. The localized dopant-free multi-gate coupling proposed here unlocks novel possibilities for quantum dots and spin qubit applications including charge and spin noise reduction, volume inversion and tunable spin-valley mixing.

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Type
research article
DOI
10.1109/ESSERC62670.2024.10719596
Author(s)
Bersano, Fabio  

EPFL

Ghini, Michele  
Bouquet, I.
Collette, Eloi  

EPFL

Martinolli, Niccolò  

EPFL

Luisier, M.
Ionescu, Mihai Adrian  

EPFL

Date Issued

2024-10-23

Publisher

IEEE

Start page

165

End page

168

Subjects

Cryo-CMOS

•

back-gate

•

SOI

•

Vapor phase etching

•

Nanomole process

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
FunderFunding(s)Grant NumberGrant URL

Swiss National Science Foundation

NCCR SPIN (phase I)

180604

Available on Infoscience
January 6, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/242537
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