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research article

Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution

Chu, Y. S.
•
Yi, J. M.
•
De Carlo, F.
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2008
Applied Physics Letters

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed. (C) 2008 American Institute of Physics.

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Type
research article
DOI
10.1063/1.2857476
Web of Science ID

WOS:000253989300119

Author(s)
Chu, Y. S.
•
Yi, J. M.
•
De Carlo, F.
•
Shen, Q.
•
Lee, Wah-Keat
•
Wu, H. J.
•
Wang, C. L.
•
Wang, J. Y.
•
Liu, C. J.
•
Wang, C. H.
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Date Issued

2008

Publisher

American Institute of Physics

Published in
Applied Physics Letters
Volume

92

Issue

10

Article Number

103119

Subjects

E-Beam Lithography

•

Fabrication

•

CIBM-PC

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPRX  
CIBM  
Available on Infoscience
November 30, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/61547
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