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  4. Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
 
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research article

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

Weber, Stefan M.
•
Bonacina, Luigi
•
Noell, Wilfried  
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2011
Review Of Scientific Instruments

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom. (C) 2011 American Institute of Physics. [doi:10.1063/1.3606440]

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Type
research article
DOI
10.1063/1.3606440
Web of Science ID

WOS:000293498400062

Author(s)
Weber, Stefan M.
•
Bonacina, Luigi
•
Noell, Wilfried  
•
Kiselev, Denis
•
Extermann, Jerome
•
Jutzi, Fabio  
•
Lani, Sebastien
•
Nenadl, Ondrej
•
Wolf, Jean-Pierre
•
de Rooij, Nico F.  
Date Issued

2011

Publisher

American Institute of Physics

Published in
Review Of Scientific Instruments
Volume

82

Article Number

075106

Subjects

laser mirrors

•

microactuators

•

micromirrors

•

micro-optomechanical devices

•

optical arrays

•

optical pulse shaping

•

packaging

•

Programmable Dispersive Filter

•

Ultraviolet Pulses

•

Micromirror Array

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/73598
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